JPH0348683U - - Google Patents

Info

Publication number
JPH0348683U
JPH0348683U JP10775389U JP10775389U JPH0348683U JP H0348683 U JPH0348683 U JP H0348683U JP 10775389 U JP10775389 U JP 10775389U JP 10775389 U JP10775389 U JP 10775389U JP H0348683 U JPH0348683 U JP H0348683U
Authority
JP
Japan
Prior art keywords
cooling chamber
evaporative cooling
vacuum pump
evaporative
reduced pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10775389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517572Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10775389U priority Critical patent/JPH0517572Y2/ja
Publication of JPH0348683U publication Critical patent/JPH0348683U/ja
Application granted granted Critical
Publication of JPH0517572Y2 publication Critical patent/JPH0517572Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10775389U 1989-09-14 1989-09-14 Expired - Lifetime JPH0517572Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10775389U JPH0517572Y2 (en]) 1989-09-14 1989-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10775389U JPH0517572Y2 (en]) 1989-09-14 1989-09-14

Publications (2)

Publication Number Publication Date
JPH0348683U true JPH0348683U (en]) 1991-05-10
JPH0517572Y2 JPH0517572Y2 (en]) 1993-05-11

Family

ID=31656431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10775389U Expired - Lifetime JPH0517572Y2 (en]) 1989-09-14 1989-09-14

Country Status (1)

Country Link
JP (1) JPH0517572Y2 (en])

Also Published As

Publication number Publication date
JPH0517572Y2 (en]) 1993-05-11

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